Thus, with these dynamic batt shaping technologies, the overall focus has been on cost reduction via fiber savings generated through better CD weight uniformities
and optimization of operating efficiencies through better fiber management systems in web forming and overall fiber processing.
These batt uniformities
can be achieved when all textile technological parameters are integrally in tune with each other and are optimized.
The TCP 9600DFM opens the process window by improving the resist and oxide etch rate uniformities
-- without compromising critical dimension (CD) uniformity," stated Dr.
The head has demonstrated improved uniformities
at oxide removal rates of as much as 4000 A/minute on standard oxide films.
Within-wafer and wafer-to-wafer oxynitride thickness uniformities
are better than 1 percent (one sigma) with the RTP Centura, with no change in thickness uniformity of the initial oxide layer.