FABRICATION Nanofabrication and nanolithography (176 references) Keywords: atomic force microscopy (AFM), anodization, bombardment, deep UV, deposition, doping, electrochemical, electron beam, etching, implantation, imprint stamp, lithography, mask, molecular beam, molecular deposition, nanoimprint,
nanojet, nanopipetted, nanotube, nanoplotter, nanostructuralization, passivation, resist, scanning probe, self-assembly, stamp, template, transistor, wet-chemical etching, x-ray Nanoimprinting (2 references) Keywords: bilayer, polymer Self-assembly (30 references) Keywords: DNA, molecular-scale electronics, nanobiotechnology, nano-object, nanostructure, pores, quantum dot, self-organized, silicon III.