SEMATECH engineers will report progress on EUV mask infrastructure, manufacturability, extendibility
and metrology, and will showcase some of their findings in over 30 papers and posters demonstrating breakthrough results in exposure tool capability, resist advances, defect-related inspection, e-beam and nanoimprint.
SEMATECH's leadership in enabling EUVL pilot line readiness and in researching new techniques for advancing EUV extendibility
and alternative lithography, coupled with access to the full-field exposure tool, located at the University at Albany's College of Nanoscale Science and Engineering, demonstrate how our research continues to support EUV readiness for the 22 nm half-pitch node.
The statements regarding (i) the extendibility
and low cost of ownership of the VECTOR platform and (ii) UMC's continued use of VECTOR, as well as other matters discussed in this news release that do not concern purely historical data, are forward-looking statements.
The statements regarding (i) productivity, cost-of-ownership and extendibility
advantages of the 300-mm tool suite; (ii) initial deployment of the 300-mm tools on Hynix's 90-nm processing lines; (iii) extension of the 300-mm tools to production of devices at smaller nodes; (iv) the expectation that the 300-mm systems will deliver the same performance benefits as the previously-delivered 200-mm tool; and (v) the ability of the 300-mm tools to allow Hynix to meet its aggressive production schedules are forward-looking statements.
All Optima HD systems incorporate Axcelis' patented spot beam technology, which provides the greatest extendibility
, productivity and process control for advanced devices.
Built on Ultratech's New Unity Platform(TM), Its Next-Generation Family of Advanced Packaging Tools Are Designed to Increase Productivity, Flexibility and Extendibility
of Current and Future Applications
Productivity and extendibility
in production cited as key factors in customer's further commitment to Optima platform
Their superior properties offer excellent extendibility
for test socket applications for sub-90 nm devices.
This system combines new imaging, illumination and stage sub-systems to achieve the industry's tightest overlay accuracy, with built-in extendibility
to future generations.
Seagate's transition to FSA continues to validate the extendibility
and intrinsic value of our flex-based wireless suspension technology.