The Xetch X3M etcher
for simultaneously etching batches of wafers or other wafer size flat substrates in the wafer boat.
With over 90 chambers already shipped to customers, the rapid industry acceptance of this new system is helping us make a major impact in the etch marketplace, where the shift to advanced production and next-generation development has shown the severe limitations of etchers
that use older technology.
Tokyo Electron Limited, headquartered in Tokyo, Japan, was established in 1963 and has been a long-term supplier of coater/developers, etchers
, probers, surface preparation cleaning systems and diffusion furnaces to Intel.
TDX will initially be applied to TEL etchers
and will centralize the EES functionality of the same type of equipment.
Auction items for sale include a large assortment of etchers
, sputterers, PECVD and CVD systems, probers, RIE's, ion mills, ashers, xray, inspection and metrology tools, wet process tools, chillers, vacuum pumps, RF power supplies, plasma and vapor prime ovens, probe stations, coaters, SRD's, leak detectors and more.
The company manufactures a complete line of photoresist and dielectric coat/bake/develop systems, microlithography exposure systems, wafer and device bonders, probers, photomasks, cleaners and etchers