Using its automatic probe
changer, probes can be switched in less than 15 sec to a laser or tactile scanning probe to perform geometric form measurements and free form definition.
000 12" range, and automatic probe
offset and temperature compensation.
The S510 System can test multiple devices simultaneously on a wafer in conjunction with a semi-automatic or fully automatic probe
changing for measuring machines is now coming on the scene, and will evolve dramatically over the next few years.
Recent advancements that permit using CMMs in a flexible fashion include automatic probe
changers, probe and fixture code recognition, automatic probe
and fixture clamping, distributed microcomputer processing, and high-performance servosystems.
Each system features a highly accurate articulating arm, including ROMER's patented infinite rotation, battery power for infinite portability and quick-change probes with automatic probe