For high-volume manufacturing applications at 45nm and beyond, Novellus' advanced low-k, ILD, IMD, and dielectric diffusion barrier
films offer the lowest k-effective, superior RC control, and an easily integrated low-cost dielectric solution.
Some 32nm ULK inter-metal dielectric and diffusion barrier
films can be negatively impacted by UVTP, changing the stress on the underlying copper-dielectric interface," said Andy Antonelli, technology manager at Novellus' PECVD business.
The dielectric diffusion barrier
is a critical layer in the interconnect stack due to the role it plays in determining device reliability," said Kevin Jennings, senior vice president and general manager of Novellus' PECVD business unit.
As little as 60 nm of amorphous Pd-P creates a solid diffusion barrier
that will allow successful wire bonding to relatively thin (1-3?
Keywords Stainless steel, Protective coating, Oxygen diffusion barrier
, Slab reheating
This occurs mainly in the case when diffusion barrier
is not used.
Duplicate experiments were conducted with each of the three types of membranes as the diffusion barrier
For organic molecules, PET is an excellent diffusion barrier
that prevents any measurable migration of substances.
Often, the material of choice when both elastomeric flexibility (particularly at low temperatures) and diffusion barrier
are required has been butyl rubber.
On the other hand, microfissuring during film crystallization (discussed above) removes this diffusion barrier
, accelerating penetration by [Al+.
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier
, reflective, data storage and display applications.
The adaptor protein ankyrinG is essential for the assembly of this diffusion barrier
and crosslinks ion channels and adhesion molecules to the cytoskeleton.
The copper die bumps permit use of a simplified under bump metallization (UBM) since the diffusion barrier
requirements of the UBM are no longer required.
Air pollutants must pass a boundary layer around the interface of the air and the passive sampler, a stagnant region produced by a diffusion barrier
and a boundary layer at the collector.
Crystallization from the melt state creates lots of tiny crystals, which fuse together to form a diffusion barrier
, whereas crystallization from reheated solid sheet creates fewer large crystals with plenty of room for oxygen to pass between them, he explains.